TY - JOUR TI - The adoption of novel cooling liquids for enhancing heat transfer performance of 3-D integrated circuits with embedded micro-channel AU - Huang Huan AU - Shan Chun AU - Long Futang AU - Zeng Zongjie AU - Xie Lei AU - Zou Fa AU - Xu Peng JN - Thermal Science PY - 2025 VL - 29 IS - 1 SP - 227 EP - 250 PT - Article AB - The nanofluids (including MWCNT based nanofluid and SWCNT based nanofluid) and liquid metal Ga68In20Sn12 are proposed to replace the conventional water as cooling liquid of micro-channel for enhancing heat transfer performance of 3-D integrated circuits (3-D IC) in this paper. An equivalent thermal model of 3-D IC with integrated micro-channel is established to investigate the heat transfer performances for using different cooling liquids. The results show that the steady-state temperature for MWCNT based nanofluid, SWCNT based nanofluid and Ga68In20Sn12 as cooling liquids can be reduced over 25.698%, 28.771%, and 35.735% than the conventional water scheme in a four-layers stacked chip, respectively. Besides, it is found that the steady-state temperature of all die layer in 3-D IC can be further reduced by increasing the micro-channel size and flow velocity of cooling liquid. Therefore, the proposed novel materials (i.e., nanofluids and Ga68In20Sn12) as cooling liquids have excellent application prospect in solving thermal problems of 3-D IC.