TY - JOUR
TI - Applying numerical control to analyze the pull-in stability of MEMS systems
AU - Zhang Yanni
AU - Han Yiman
AU - Zhao Xin
AU - Zhao Zhen
AU - Pang Jing
JN - Thermal Science
PY - 2024
VL - 28
IS - 3
SP - 2171
EP - 2178
PT - Article
AB - The micro-electro-mechanical system is widely used for energy harvesting and  thermal wind sensor, its efficiency and reliability depend upon the pull-in  instability. This paper studies a micro-electro-mechanical system using  He-Liu [34] formulation for finding its frequency-amplitude relationship.  The system periodic motion, pull-in instability and pseudo-periodic motion  are discussed. This paper offers a new window for security monitoring of the  system reliable operation.